{"id":5282,"date":"2026-08-04T15:14:58","date_gmt":"2026-08-04T06:14:58","guid":{"rendered":"https:\/\/www.aem.imr.tohoku.ac.jp\/?page_id=5282"},"modified":"2026-08-05T11:11:48","modified_gmt":"2026-08-05T02:11:48","slug":"focused-ion-beam-system-thermo-fisher-scientific-versa-3d","status":"publish","type":"page","link":"https:\/\/www.aem.imr.tohoku.ac.jp\/en\/focused-ion-beam-system-thermo-fisher-scientific-versa-3d\/","title":{"rendered":"Focused Ion Beam System Thermo Fisher Scientific Versa 3D"},"content":{"rendered":"<p><em>*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.*<\/em><\/p>\n<div class=\"equipment-header\" style=\"text-align: center; margin-bottom: 2em;\">\n  <img decoding=\"async\" class=\"aligncenter size-medium\" src=\"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-content\/uploads\/2021\/07\/1_4-1-edited.jpg\" alt=\"Focused Ion Beam System Versa 3D appearance\" style=\"max-width: 100%; height: auto; border-radius: 8px; box-shadow: 0 4px 12px rgba(0,0,0,0.1);\" \/>\n<\/div>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Overview<\/h2>\n<div style=\"line-height: 1.8; font-size: 1.05em;\">\n<p>The Thermo Fisher Scientific <strong>Versa 3D<\/strong> is a focused ion beam (FIB) system combining an SEM equipped with a Schottky field-emission (FE) electron gun and a dual-beam Ga-FIB. It allows fine-scale specimen machining and cross-sectional SEM\/SIM observation within the same chamber.<\/p>\n<p>It is equipped with an EasyLift micromanipulator for specimen pickup, supporting micro-sampling for TEM thin-film specimen preparation. The system also supports 3D structural analysis via serial sectioning (Slice &amp; View).<\/p>\n<\/div>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Features<\/h2>\n<ul style=\"line-height: 1.8; padding-left: 1.2em;\">\n<li style=\"margin-bottom: 0.8em;\"><strong>Dual-Beam Ga-FIB:<\/strong> SEM (FE-SEM) observation and FIB (Ga ion gun) machining in the same chamber, allowing in-situ inspection of machined areas.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>EasyLift Specimen Pickup:<\/strong> Prepares TEM thin-film specimens by micro-sampling and transfers them to a dedicated grid.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>Slice &amp; View (3D Structural Analysis):<\/strong> Automated serial sectioning via Auto Slice &amp; View G3 reconstructs 3D images from a series of SEM cross-sectional images.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>SE\/BSE\/SIM Observation Modes:<\/strong> Supports secondary electron, backscattered electron, and secondary ion imaging modes.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>Protective Coating:<\/strong> Supports Pt and C deposition as a pre-machining protective coating to reduce FIB damage.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>Backscattered Electron Detector &amp; EDS Analysis:<\/strong> Also supports compositional contrast imaging and elemental analysis.<\/li>\n<\/ul>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Specifications<\/h2>\n<div style=\"background-color: #fff9e6; border-left: 4px solid #ff9800; padding: 10px 14px; margin: 1em 0; border-radius: 4px; font-size: 0.95em; line-height: 1.6;\">\n  <strong style=\"color: #d97706;\">[Specification Notice]<\/strong><br \/>\n  The content of this page has been reviewed and corrected against the manufacturer&#8217;s system manual (an internal document, not publicly available). Actual equipment configurations or specifications may still differ in part from the standard manual specifications, so please consult the equipment manager for details regarding current capabilities and conditions of use.\n<\/div>\n<table style=\"width: 100%; border-collapse: collapse; margin-top: 1em; font-size: 0.95em;\">\n<tbody>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Manufacturer<\/th>\n<td style=\"padding: 10px;\">Thermo Fisher Scientific<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Model<\/th>\n<td style=\"padding: 10px;\">Versa 3D (Dual-Beam FIB-SEM)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Electron Gun<\/th>\n<td style=\"padding: 10px;\">Schottky field-emission (FE) electron gun (accelerating voltage 0.2&#8211;30 kV)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Ion Gun<\/th>\n<td style=\"padding: 10px;\">Ga ion gun (accelerating voltage 0.5&#8211;30 kV)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">SEM Observation Modes<\/th>\n<td style=\"padding: 10px;\">SE \/ BSE \/ SIM<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Protective Coating<\/th>\n<td style=\"padding: 10px;\">Pt and C deposition<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Specimen Pickup<\/th>\n<td style=\"padding: 10px;\">EasyLift<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">3D Reconstruction<\/th>\n<td style=\"padding: 10px;\">Slice &amp; View (automated serial sectioning via Auto Slice &amp; View G3)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Analysis \/ Detectors<\/th>\n<td style=\"padding: 10px;\">Backscattered electron detector, EDS detector<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Max. Specimen Size<\/th>\n<td style=\"padding: 10px;\">150 mm diameter<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Funding Category<\/th>\n<td style=\"padding: 10px;\">ARIM<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Location<\/th>\n<td style=\"padding: 10px;\">Room 2-613<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Manuals &amp; Guidelines<\/h2>\n<div style=\"background-color: #f0f7ff; border-left: 4px solid #0056b3; padding: 12px 16px; margin-top: 1em; border-radius: 4px; line-height: 1.7;\">\n<p style=\"margin: 0;\"><strong>[Manuals &amp; Guidelines]<\/strong><br \/>The manufacturer&#8217;s manual for this instrument is kept by the equipment manager (an internal document, not publicly available). For inquiries regarding instrument use, please contact the equipment manager.<\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.* Overview The Thermo Fisher Scientific Versa 3D is a focused ion beam (FIB) system combining an SEM equipped with a Schottky field-emission (FE) electron gun and a dual-beam Ga-FIB. It allows fine-scale specimen machining <a href=\"https:\/\/www.aem.imr.tohoku.ac.jp\/en\/focused-ion-beam-system-thermo-fisher-scientific-versa-3d\/\" class=\"more-link\">&#8230;<span class=\"screen-reader-text\">  Focused Ion Beam System Thermo Fisher Scientific Versa 3D<\/span><\/a><\/p>\n","protected":false},"author":11,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_locale":"en_US","_original_post":"5280","footnotes":""},"class_list":["post-5282","page","type-page","status-publish","hentry","en-US"],"_links":{"self":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages\/5282","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/users\/11"}],"replies":[{"embeddable":true,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/comments?post=5282"}],"version-history":[{"count":3,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages\/5282\/revisions"}],"predecessor-version":[{"id":5370,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages\/5282\/revisions\/5370"}],"wp:attachment":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/media?parent=5282"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}