{"id":5286,"date":"2026-08-04T15:15:00","date_gmt":"2026-08-04T06:15:00","guid":{"rendered":"https:\/\/www.aem.imr.tohoku.ac.jp\/?page_id=5286"},"modified":"2026-08-04T15:15:00","modified_gmt":"2026-08-04T06:15:00","slug":"focused-ion-beam-system-thermo-fisher-scientific-quanta-3d","status":"publish","type":"page","link":"https:\/\/www.aem.imr.tohoku.ac.jp\/en\/focused-ion-beam-system-thermo-fisher-scientific-quanta-3d\/","title":{"rendered":"Focused Ion Beam System Thermo Fisher Scientific Quanta 3D"},"content":{"rendered":"<p><em>*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.*<\/em><\/p>\n<div class=\"equipment-header\" style=\"text-align: center; margin-bottom: 2em;\">\n  <img decoding=\"async\" class=\"aligncenter size-medium\" src=\"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-content\/uploads\/2021\/07\/1_3-edited.jpg\" alt=\"Focused Ion Beam System Quanta 3D appearance\" style=\"max-width: 100%; height: auto; border-radius: 8px; box-shadow: 0 4px 12px rgba(0,0,0,0.1);\" \/>\n<\/div>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Overview<\/h2>\n<div style=\"line-height: 1.8; font-size: 1.05em;\">\n<p>The Thermo Fisher Scientific <strong>Quanta 3D<\/strong> is a focused ion beam (FIB) system combining an SEM equipped with a tungsten (W) electron gun and a dual-beam Ga-FIB. It is used for fine-scale specimen machining, such as preparing TEM thin-film specimens, while performing SEM\/SIM observation.<\/p>\n<p>It is equipped with an Omniprobe micromanipulator for specimen pickup, supporting micro-sampling for TEM specimen preparation.<\/p>\n<\/div>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Features<\/h2>\n<ul style=\"line-height: 1.8; padding-left: 1.2em;\">\n<li style=\"margin-bottom: 0.8em;\"><strong>Dual-Beam Ga-FIB:<\/strong> SEM (W electron gun) observation and FIB (Ga ion gun) machining in the same chamber, allowing in-situ inspection of machined areas.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>Omniprobe Specimen Pickup:<\/strong> Prepares TEM thin-film specimens by micro-sampling and transfers them to a dedicated grid.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>SEM\/SIM Observation:<\/strong> Supports both secondary electron imaging and secondary ion imaging modes.<\/li>\n<li style=\"margin-bottom: 0.8em;\"><strong>Protective Coating:<\/strong> Supports C and W deposition as a pre-machining protective coating to reduce FIB damage.<\/li>\n<\/ul>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Specifications<\/h2>\n<div style=\"background-color: #fff9e6; border-left: 4px solid #ff9800; padding: 10px 14px; margin: 1em 0; border-radius: 4px; font-size: 0.95em; line-height: 1.6;\">\n  <strong style=\"color: #d97706;\">[Specification Notice]<\/strong><br \/>\n  Actual equipment configurations or specifications may differ from standard manual specifications. Please consult the equipment manager for details regarding current capabilities and conditions of use.\n<\/div>\n<table style=\"width: 100%; border-collapse: collapse; margin-top: 1em; font-size: 0.95em;\">\n<tbody>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Manufacturer<\/th>\n<td style=\"padding: 10px;\">Thermo Fisher Scientific<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Model<\/th>\n<td style=\"padding: 10px;\">Quanta 3D (Dual-Beam FIB-SEM)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Electron Gun<\/th>\n<td style=\"padding: 10px;\">Tungsten (W) thermionic electron gun (accelerating voltage 1&#8211;30 kV)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Ion Gun<\/th>\n<td style=\"padding: 10px;\">Ga ion gun (accelerating voltage 5&#8211;30 kV)<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">SEM Observation Modes<\/th>\n<td style=\"padding: 10px;\">SE \/ SIM<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Protective Coating<\/th>\n<td style=\"padding: 10px;\">C and W deposition<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Specimen Pickup<\/th>\n<td style=\"padding: 10px;\">Omniprobe<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Max. Specimen Size<\/th>\n<td style=\"padding: 10px;\">90 mm diameter<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<th style=\"width: 28%; padding: 10px; background-color: #f8f9fa; text-align: left; font-weight: bold; border-right: 1px solid #e0e0e0;\">Location<\/th>\n<td style=\"padding: 10px;\">Room 2-613<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 style=\"border-bottom: 2px solid #0056b3; padding-bottom: 6px; margin-top: 1.5em; color: #0056b3;\">Manuals &amp; Guidelines<\/h2>\n<div style=\"background-color: #f0f7ff; border-left: 4px solid #0056b3; padding: 12px 16px; margin-top: 1em; border-radius: 4px; line-height: 1.7;\">\n<p style=\"margin: 0;\"><strong>[Manuals &amp; Guidelines]<\/strong><br \/>Manuals are planned for release at a later date and are not yet publicly available. For inquiries regarding instrument use, please contact the equipment manager.<\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.* Overview The Thermo Fisher Scientific Quanta 3D is a focused ion beam (FIB) system combining an SEM equipped with a tungsten (W) electron gun and a dual-beam Ga-FIB. It is used for fine-scale specimen <a href=\"https:\/\/www.aem.imr.tohoku.ac.jp\/en\/focused-ion-beam-system-thermo-fisher-scientific-quanta-3d\/\" class=\"more-link\">&#8230;<span class=\"screen-reader-text\">  Focused Ion Beam System Thermo Fisher Scientific Quanta 3D<\/span><\/a><\/p>\n","protected":false},"author":11,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_locale":"en_US","_original_post":"5284","footnotes":""},"class_list":["post-5286","page","type-page","status-publish","hentry","en-US"],"_links":{"self":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages\/5286","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/users\/11"}],"replies":[{"embeddable":true,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/comments?post=5286"}],"version-history":[{"count":2,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages\/5286\/revisions"}],"predecessor-version":[{"id":5291,"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/pages\/5286\/revisions\/5291"}],"wp:attachment":[{"href":"https:\/\/www.aem.imr.tohoku.ac.jp\/wp-json\/wp\/v2\/media?parent=5286"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}