Plasma Cleaner Gatan Solarus Model 950

*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.*

Plasma Cleaner Solarus Model 950 appearance

Overview

The Gatan Solarus Model 950 Advanced Plasma System is a high-efficiency radical plasma cleaning instrument designed to remove hydrocarbon and organic contamination from electron microscopy (TEM/STEM, SEM) specimens and TEM specimen holder tips.

It effectively eliminates electron-beam-induced contamination and hydrocarbon buildup during high-resolution FEG-TEM or FE-SEM imaging and microanalysis.

Features

  • Low-Damage, Powerful Cleaning with H2/O2 Plasma: Utilizes hydrogen/oxygen radical plasma chemistry to rapidly convert organic hydrocarbons into H2O and CO2 gases with minimal thermal or oxidative damage compared to traditional air or Ar/O2 plasmas.
  • Direct TEM Specimen Holder Loading: Features a dedicated front insertion port compatible with JEOL, FEI, Hitachi, and Gatan TEM holders, allowing simultaneous cleaning of both the specimen and holder tip.
  • Top-Loading Chamber for Diverse Samples: Accommodates SEM stubs, TEM grids, and bulk samples via a top-loading vacuum chamber.
  • Touchscreen Interface & Preset Recipes: The front color touchscreen display enables one-touch execution of pre-configured recipes (TEM holder clean, SEM sample clean) and custom user recipe storage.
  • Clean, Oil-Free Vacuum System: An integrated turbomolecular drag pump backed by a multi-stage oil-free diaphragm pump ensures fast, hydrocarbon-free vacuum pumping.

Specifications

[Specification Notice]
Actual equipment configurations or specifications may differ from standard manual specifications. Please consult the equipment manager for details regarding current capabilities and conditions of use.
Manufacturer Gatan, Inc.
Model Solarus Model 950 (Advanced Plasma System)
RF Power 13.56 MHz, 0 to 50 W
Process Gases H2 (Hydrogen), O2 (Oxygen), Ar (Argon) 3-channel mass flow control
Target Specimens TEM specimens, TEM specimen holder tips, SEM specimens, TEM grids
User Interface Front color LCD touchscreen display
Vacuum System Turbomolecular drag pump + oil-free multi-stage diaphragm pump
Dimensions / Weight 420 (W) × 570 (D) × 480 (H) mm / approx. 36 kg
Location Room 2-B13

Manuals & Guidelines