- (Scanning) Transmission electron microscope (TEM/STEM)
- TEM sample holder
- Sample preparation device
- Electron microscope peripheral equipment
- Other equipment
Transmission electron microscopy (TEM/STEM)
| Division | S/TEM | S/TEM | S/TEM | TEM | TEM |
|---|---|---|---|---|---|
| Appearance |  |  |  |  |  |
| Name | JEM-ARM200F W Collector | JEM-ARM200F STEM Collector | JEM-2100plus | EM-002B | JEM-2000EX |
| Function | TEM/STEM/EDS/EELS | TEM /STEM/EDS/EELS | TEM/STEM/EDS | TEM/STEM/EDS | TEM |
| Location | 2-B13 | 2-B14 | 3-103 | 1-105 | 1-105 |
| Maintenance classification (financial resources) | ARIM | ||||
| Notes | EDS malfunction High voltage malfunction up to 160kV CL fixed aperture dirty | Slightly unstable lens |
TEM sample holder
| Classification | Sample heating holder | Sample cooling holder | Sample heating holder | Sample cooling holder | |
|---|---|---|---|---|---|
| Appearance |  |  |  |  | |
| Name | |||||
| Function | For JEM-2000EXII | For JEM-2000EXII | For ARM200F/2100plus Protchips | ARM200F/2100plus For For bulk | |
| Location | 1-105 | 1-105 | 2-B14 | 2-B14 | |
| Notes | Adjusting | Adjusting |
| Division | Two-axis tilt holder for analysis | Reinforced specification analysis two-axis tilt holder | Single-axis tilt holder | Holder for tomography | |
|---|---|---|---|---|---|
| Appearance | |  |  |  | |
| Name | |||||
| Function | For ARM200F/2100plus | For ARM200F/2100plus | For ARM200F/2100plus | For ARM200F/2100plus | |
| Location | 3-103,2-B13 | 2-B13,2-B14 | 3-103,2-B13,2-B14 | 2-B14 | |
| Notes |
TEM sample preparation
| Division | FIB | FIB | FIB | Low energy milling | |
|---|---|---|---|---|---|
| Appearance |  |  |  |  | |
| Name | Thermo Fisher Scientific Versa 3D | Thermo Fisher Scientific Quanta 3D | TESCAN AMBER X | Technoorg Linda Gentle Mill 3 | |
| Function | ・Dual beam Ga-FIB ・SEM (FE-SEM) ・FIB (Ga ion gun) ・Micro sampling ・Pt &C Protective film formation ・3D image acquisition by serial sectioning method ・Backscattered electron detector ・EDS analysis | ・Dual beam Ga-FIB ・SEM (W electron gun) ・FIB (Ga ion gun) ・Micro sampling ・C & W protective film formation | ・Dual beam Xe plasma FIB ・SEM (FE-SEM) ・FIB (Xe plasma) ・Ga free ・Micro sampling ・Pt &C protective film formation ・TOF-SIMS using FIB as the primary ion source ・3D image acquisition by serial sectioning ・Backscattered electron detector ・EDS analysis ・Rocking stage installed | ・Low energy plasma milling ・Argon ion broad beam ・Beam current 5 to 80 μA ・Ion irradiation angle 0~6° | |
| Location | 2-613 | 2-613 | 2 -612 | 2-613 | |
| Maintenance classification (financial resources) | ARIM | ARIM | ARIM | ||
| Notes | Preparing |
| Classification | Ion Milling | Ion milling | Ion slicer | Electrolytic polishing equipment | |
|---|---|---|---|---|---|
| Appearance |  |  |  |  | |
| Name | model 1010 | PIPS II(B) | EM-09100IS | ||
| Function | Auto stop Sample cooling | Automatic stop Sample cooling | Cross-section sample preparation | Twin jet method | |
| Location | 1-105 | 1-105 | 1-105 | ||
| Maintenance classification (financial resources) | *Entrusted management equipment | ARIM | |||
| Notes | End | Rental only |
TEM sample related equipment
| Classification | Disc punch | Lap grinder | Low speed cutter | Dimple grinder | Diamond wire saw |
|---|---|---|---|---|---|
| Appearance |  |  |  |  |  |
| Name | Homemade | Marteau | Gatan 656 | ||
| Function | |||||
| Location | 1-105 | 1-105 | 1-105 | 1-105 | 1-105 |
| Notes |
| Classification | Automatic polishing machine | Hot plate | Ultrasonic disc punching machine | ||
|---|---|---|---|---|---|
| Appearance |  |  |  | ||
| Name | Homemade | ||||
| Features | Φ3mm disk | ||||
| Location | 1-105 | 1-105 | 1-105 | ||
| Notes |
| Division | Digital microscope | Stereo microscope | Optical microscope | ||
|---|---|---|---|---|---|
| Appearance |  |  | | ||
| Name | |||||
| Features | |||||
| Location | 1-105,2-B13,2-B14,2-613,3-103 | 1-105 | 1-105 | ||
| Notes |
Electron microscope related equipment
| Classification | Osmium coater | Carbon coater | Ion cleaner | Ion cleaner | Ion cleaner |
|---|---|---|---|---|---|
| Appearance |  | |  |  |  |
| Name | NEOC-PRO | ||||
| Function | |||||
| Location | 1-111 | 2-613 | 3-103 | 2-B13 | 2-B14 |
| Notes | Adjusting |
| Classification | Plasma etching equipment | Plasma cleaner | Plasma cleaner | ||
|---|---|---|---|---|---|
| Appearance |  |  | | ||
| Name | Solarus | Solarus | |||
| Function | Gas type: Ar,H2,O2 | Gas type: Ar,H2,O2 | |||
| Location | 1-105 | 2-B13 | 2-B14 | ||
| Maintenance classification (financial resources) | ARIM | ||||
| Notes | Out of order/unrepairable |
Other devices
| Classification | Multipurpose X-ray diffractometer | Thermal analyzer | |||
|---|---|---|---|---|---|
| Appearance |  |  | |||
| Name | SmartLab 9SW | Thermo plus EVO Ⅱ | |||
| Function | XRD | DSC/TG-DTA | |||
| Location | 2-613 | 2-613 | |||
| Maintenance classification (financial resources) | ARIM | ARIM | |||
| Notes |
Software
- Crystal structure modeling/electron diffraction simulation
- High-resolution electron microscope image simulation
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