*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.*
Overview
The Thermo Fisher Scientific Versa 3D is a focused ion beam (FIB) system combining an SEM equipped with a Schottky field-emission (FE) electron gun and a dual-beam Ga-FIB. It allows fine-scale specimen machining and cross-sectional SEM/SIM observation within the same chamber.
It is equipped with an EasyLift micromanipulator for specimen pickup, supporting micro-sampling for TEM thin-film specimen preparation. The system also supports 3D structural analysis via serial sectioning (Slice & View).
Features
- Dual-Beam Ga-FIB: SEM (FE-SEM) observation and FIB (Ga ion gun) machining in the same chamber, allowing in-situ inspection of machined areas.
- EasyLift Specimen Pickup: Prepares TEM thin-film specimens by micro-sampling and transfers them to a dedicated grid.
- Slice & View (3D Structural Analysis): Automated serial sectioning via Auto Slice & View G3 reconstructs 3D images from a series of SEM cross-sectional images.
- SE/BSE/SIM Observation Modes: Supports secondary electron, backscattered electron, and secondary ion imaging modes.
- Protective Coating: Supports Pt and C deposition as a pre-machining protective coating to reduce FIB damage.
- Backscattered Electron Detector & EDS Analysis: Also supports compositional contrast imaging and elemental analysis.
Specifications
The content of this page has been reviewed and corrected against the manufacturer’s system manual (an internal document, not publicly available). Actual equipment configurations or specifications may still differ in part from the standard manual specifications, so please consult the equipment manager for details regarding current capabilities and conditions of use.
| Manufacturer | Thermo Fisher Scientific |
|---|---|
| Model | Versa 3D (Dual-Beam FIB-SEM) |
| Electron Gun | Schottky field-emission (FE) electron gun (accelerating voltage 0.2–30 kV) |
| Ion Gun | Ga ion gun (accelerating voltage 0.5–30 kV) |
| SEM Observation Modes | SE / BSE / SIM |
| Protective Coating | Pt and C deposition |
| Specimen Pickup | EasyLift |
| 3D Reconstruction | Slice & View (automated serial sectioning via Auto Slice & View G3) |
| Analysis / Detectors | Backscattered electron detector, EDS detector |
| Max. Specimen Size | 150 mm diameter |
| Funding Category | ARIM |
| Location | Room 2-613 |
Manuals & Guidelines
[Manuals & Guidelines]
The manufacturer’s manual for this instrument is kept by the equipment manager (an internal document, not publicly available). For inquiries regarding instrument use, please contact the equipment manager.