Atomic Resolution Analytical Electron Microscope JEM-ARM200F (STEM Corrector)

*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.*

JEM-ARM200F STEM Corrector appearance

Overview

The JEOL JEM-ARM200F (STEM-Corrector configuration) is a 200 kV Cold Field Emission Gun (Cold-FEG) atomic-resolution scanning transmission electron microscope equipped with a probe spherical aberration corrector for the illumination system.

Featuring a sub-angstrom focused probe, it delivers high S/N ratio atomic-column STEM imaging (HAADF, ABF, BF) and atomic-scale microanalysis using integrated EDS and Gatan Enfinium EELS systems.

Features

  • Probe Spherical Aberration Corrector (STEM Cs Corrector): Corrects illumination spherical aberration to form a sub-angstrom electron probe with high beam current, enabling atomic-resolution imaging and elemental mapping.
  • Cold Field Emission Gun (Cold-FEG): Provides ultra-high brightness and narrow energy spread, supporting high-resolution Electron Energy Loss Spectroscopy (EELS) and chemical state analysis.
  • Atomic-Scale Microanalysis (EDS / EELS): Integrated with high-sensitivity EDS detectors and the Gatan Enfinium EELS system for micro-area chemical composition and electronic structure evaluation.
  • Simultaneous Multi-Channel STEM: Simultaneous acquisition of Z-contrast HAADF, light-element sensitive ABF, and bright-field BF STEM images.

Specifications

[Specification Notice]
Actual equipment configurations or specifications may differ from standard manual specifications. Please consult the equipment manager for details regarding current capabilities and conditions of use.
Manufacturer JEOL Ltd.
Model JEM-ARM200F (STEM-Corrector)
Electron Source Cold Field Emission Gun (Cold-FEG)
Accelerating Voltage 200 kV, 80 kV
Cs Corrector Illumination/Probe Cs Corrector
Resolution (200 kV) STEM-HAADF resolution: 100 pm
Max Specimen Tilt X ±35° / Y ±30°
Analytical Capabilities STEM imaging (HAADF/LAADF/ABF/BF), STEM-EDS elemental analysis, STEM-EELS (Gatan Enfinium) chemical state analysis
Location Room 2-B14

Manuals & Guidelines