Focused Ion Beam System Thermo Fisher Scientific Quanta 3D

*Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.*

Focused Ion Beam System Quanta 3D appearance

Overview

The Thermo Fisher Scientific Quanta 3D is a focused ion beam (FIB) system combining an SEM equipped with a tungsten (W) electron gun and a dual-beam Ga-FIB. It is used for fine-scale specimen machining, such as preparing TEM thin-film specimens, while performing SEM/SIM observation.

It is equipped with an Omniprobe micromanipulator for specimen pickup, supporting micro-sampling for TEM specimen preparation.

Features

  • Dual-Beam Ga-FIB: SEM (W electron gun) observation and FIB (Ga ion gun) machining in the same chamber, allowing in-situ inspection of machined areas.
  • Omniprobe Specimen Pickup: Prepares TEM thin-film specimens by micro-sampling and transfers them to a dedicated grid.
  • SEM/SIM Observation: Supports both secondary electron imaging and secondary ion imaging modes.
  • Protective Coating: Supports C and W deposition as a pre-machining protective coating to reduce FIB damage.

Specifications

[Specification Notice]
Actual equipment configurations or specifications may differ from standard manual specifications. Please consult the equipment manager for details regarding current capabilities and conditions of use.
Manufacturer Thermo Fisher Scientific
Model Quanta 3D (Dual-Beam FIB-SEM)
Electron Gun Tungsten (W) thermionic electron gun (accelerating voltage 1–30 kV)
Ion Gun Ga ion gun (accelerating voltage 5–30 kV)
SEM Observation Modes SE / SIM
Protective Coating C and W deposition
Specimen Pickup Omniprobe
Max. Specimen Size 90 mm diameter
Location Room 2-613

Manuals & Guidelines

[Manuals & Guidelines]
Manuals are planned for release at a later date and are not yet publicly available. For inquiries regarding instrument use, please contact the equipment manager.