JEM-2100plus: Micro-Area Electron Diffraction

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Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.

Original post date (Japanese version): June 22, 2024

💡 Converge the electron beam on the specimen and acquire a diffraction pattern from a region narrower than the selected area aperture.

NBD/CBD

  1. Display the image using the normal method.
  2. Change irradiation mode
    1. [PANEL-L:PROBE CONTROL:NBD/CBD] Change to probe irradiation mode
  3. Converge and center the beam
    1. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
    2. [PANEL-L : DEF/STIG : BRIGHT TILT] Select Bright Field irradiation mode
    3. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen using Beam Shift
  4. Centering the condenser lens aperture
    1. [PANEL-L : BRIGHTNESS] Spread the beam to about the same size as the screen
    2. [CLA: Aperture selection knob] Select the diameter of the condenser aperture.
    3. [CLA: Aperture position adjustment knob: Front-back/Left-right] Move the aperture to the center of the screen.
  5. Irradiation system adjustment 1
    1. HT Wobbler On
      1. [TC : Wobbler Controller : HT] or [PANEL-R: HT WOBB] On
      2. Acceleration voltage fluctuates and the image expands/contracts
    2. Irradiation system adjustment (Condenser mini lens)
      1. [PANEL-L : DEF/STIG : BRIGHT TILT] or [TC : Alignment Panel : Deflector : Bright Tilt] Select Bright Field irradiation mode
      2. [PANEL-L/R: DEF/STIG-X/Y] Adjust Beam-Tilt + [PANEL-L/R: Shift-X/Y] Beam-Shift so that the convergence of the electron beam becomes isotropic at the center of the fluorescent screen.
    3. HT Wobbler Off
      1. [TC : Wobbler Controller : HT] or [PANEL-R: HT WOBB] Off
  6. Irradiation system adjustment 2
    1. [PANEL-L:PROBE CONTROL:TEM] Change to TEM irradiation mode
    2. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen using Beam Shift
    3. [PANEL-L:PROBE CONTROL:NBD/CBD] Change to probe irradiation mode
    4. Repeat the above to minimize the deviation of the electron beam
    5. [PANEL-L:PROBE CONTROL:TEM] Change to TEM irradiation mode
  7. Insert and center the condenser lens aperture
  8. Specify measurement location
    1. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
    2. [PANEL-L/R: SHIFT-X/Y] Move the beam to the measurement location using Beam Shift.
  9. Display electron diffraction
    1. [PANEL-R : Function : SA DIFF] Change to diffraction mode
    2. [PANEL-R : MAG/CAM L] Set camera length
    3. Spot centering
      1. [PANEL-L : DEF/STIG : PLA] Select Projector Lens Alignment mode
      2. [PANEL-L/R: DEF/STIG-X/Y] Center the transmitted wave to the center of the fluorescent screen

Simplified Method

  1. Display DIFF using the normal method
    1. Adjust diff focus in advance
  2. Display the image using the normal method.
  3. Irradiate the measurement location with beam
    1. [CLA#4(Φ10um)] Insert and center a small CL aperture
    2. [PANEL-L : PROBE CONTROL : SPOT SIZE] 5: Decrease SPOT size
    3. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
    4. Adjust CL-STIG
      1. [PANEL-L : DEF/STIG : COND STIG] Select Condenser Lens Astigmatism adjustment mode
      2. [PANEL-L/R: DEF/STIG-X/Y] (Cond STIG) Adjust so that the beam is maximally converged
    5. [PANEL-L/R: SHIFT-X/Y] Move the beam to the measurement location using Beam Shift.
      • It is better to move the specimen rather than moving the beam from the center of the screen as much as possible.
  4. Display electron diffraction
    1. [PANEL-R : Function : SA DIFF] Change to diffraction mode
    2. [PANEL-R : MAG/CAM L] Set camera length
    3. Spot centering
      1. [PANEL-L : DEF/STIG : PLA] Select Projector Lens Alignment mode
      2. [PANEL-L/R: DEF/STIG-X/Y] Center the transmitted wave to the center of the fluorescent screen

*This post was created by an AI agent.