JEM-2100Plus: Irradiation System Interlock Ratio Adjustment

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Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.

Original post date (Japanese version): June 22, 2024

Tilt adjustment (Tilt 2-step deflection adjustment)

💡 Adjust the interlocking ratio of the focusing lens deflection coil so that the position does not change even if the incident electrons are beam-tilted.

  1. [PANEL-R : Function : MAG1]In image observation mode
  2. [PANEL-R : MAG/CAM L] Magnification settingAppropriate magnification (e.g. x40K)
  3. beam centering
    1. [PANEL-L: BRIGHTNESS] Focus the beam.
    2. [PANEL-L: SHIFT: BRIGHT TILT] or [TC: Alignment Panel: Deflector: Bright Tilt] Bright field irradiation mode selection
    3. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen.
  4. Tilt 2-stage deflection adjustment mode selection
    1. [TEM Center: Top menu] Control → Alignment Panel
      1. The Alignment Panel (for JEM Administrators) is displayed.
    2. [TC: Alignment Panel: Compensator: Tilt] Tilt 2-stage deflection adjustment mode selection
  5. Tilt-X Wobbler on
    1. [TEM Center: Top menu] Control → Wobbler
      1. Wobbler Controller (for JEM Administrators) is displayed
      2. [TC: Wobbler Controller : Tilt-X] On
  6. Tilt-X 2-stage deflection adjustment
    1. If the current ratio (Tilt-balance) adjustment is insufficient: the beam splits in the X direction
      1. [PANEL-L/R: DEF/STIG-X]　The two divided beams are superimposed into one.
    2. If the current ratio (Angle-balance) adjustment is insufficient: the beam splits in the Y direction
      1. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode selection
      2. [PANEL-L/R: DEF/STIG-X]　The two divided beams are superimposed into one.
      3. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode Off
  7. Tilt-X Wobbler off
    1. [TC: Wobbler Controller : Tilt-X] Off
  8. beam centering(if necessary)
    1. [PANEL-L: BRIGHTNESS] Focus the beam.
    2. [PANEL-L: SHIFT: BRIGHT TILT] or [TC: Alignment Panel: Deflector: Bright Tilt] Bright field irradiation mode selection
    3. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen.
  9. Tilt-Y Wobbler on
    1. [TEM Center: Top menu] Control → Wobbler
      1. Wobbler Controller (for JEM Administrators) is displayed
      2. [TC: Wobbler Controller : Tilt-Y] On
  10. Tilt-X 2-stage deflection adjustment
    1. If the current ratio (Tilt-balance) adjustment is insufficient: the beam splits in the Y direction
      1. [PANEL-L/R: DEF/STIG-Y] Overlap the two divided beams into one.
    2. If the current ratio (Angle-balance) adjustment is insufficient: the beam splits in the X direction
      1. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode selection
      2. [PANEL-L/R: DEF/STIG-Y] Overlap the two divided beams into one.
      3. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode Off
  11. Tilt-Y Wobbler off
    1. [TC: Wobbler Controller : Tilt-Y] Off
  12. beam centering(if necessary)
    1. [PANEL-L: BRIGHTNESS] Focus the beam.
    2. [PANEL-L: SHIFT: BRIGHT TILT] or [TC: Alignment Panel: Deflector: Bright Tilt] Bright field irradiation mode selection
    3. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen.

Horizontal adjustment (Shift 2-step deflection adjustment)

💡 Adjust the interlocking ratio of the focusing lens deflection coil so that the beam does not tilt when moving the cowstick spot on the sample (Beam-Shift).

  1. [PANEL-R : Function : DIFF]Electron diffractionモード中
  2. [PANEL-R: MAG/CAM L] Camera length setting Appropriate camera length magnification (e.g. 80cm)
  3. Brightness adjustment
    1. [PANEL-L: BRIGHTNESS] Turn fully clockwise: Widen the beam
  4. DIFF Focus adjustment
    1. [PANEL-R: DIFF FOCUS] Display cowstick spot.
  5. Shift 2-stage deflection adjustment mode selection
    1. [TEM Center: Top menu] Control → Alignment Panel
      1. The Alignment Panel (for JEM Administrators) is displayed.
    2. [TC: Alignment Panel: Compensator: Shift] Shift 2-stage deflection adjustment mode selection
  6. Shift-X Wobbler on
    1. [TEM Center: Top menu] Control → Wobbler
      1. Wobbler Controller (for JEM Administrators) is displayed
      2. [TC: Wobbler Controller : Shift-X] On
  7. Shift-X 2-step deflection adjustment
    1. If the current ratio (Shift-balance) adjustment is insufficient: the cowstick spot is divided in the X direction
      1. [PANEL-L/R: DEF/STIG-X] Overlap the two cow stick spots into one.
    2. If the current ratio (Angle-balance) adjustment is insufficient: the cowstick spot is divided in the Y direction
      1. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode selection
      2. [PANEL-L/R: DEF/STIG-X] Overlap the two cowstick spots into one.
      3. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode Off
  8. Shift-X Wobbler off
    1. [TC: Wobbler Controller : Shift-X] Off
  9. spot centering(if necessary)
    1. [PANEL-L: DEF/STIG: BRIGHT TILT] or [TC: Alignment Panel: Deflector: Bright Tilt] Bright field irradiation mode selection
    2. [PANEL-L/R: DEF/STIG-X/Y] Adjust so that the cow stick spot and the center of the fluorescent screen match with Beam-Tilt.
  10. Shift-X Wobbler on
    1. [TEM Center: Top menu] Control → Wobbler
      1. Wobbler Controller (for JEM Administrators) is displayed
      2. [TC: Wobbler Controller : Shift-X] On
  11. Shift-X 2-step deflection adjustment
    1. If the current ratio (Shift-balance) adjustment is insufficient: the cowstick spot is divided in the X direction
      1. [PANEL-L/R: DEF/STIG-X] Overlap the two cow stick spots into one.
    2. If the current ratio (Angle-balance) adjustment is insufficient: the cowstick spot is divided in the Y direction
      1. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode selection
      2. [PANEL-L/R: DEF/STIG-X] Overlap the two cow stick spots into one.
      3. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode Off
  12. Shift-X Wobbler off
    1. [TC: Wobbler Controller : Shift-X] Off
  13. spot centering(if necessary)
    1. [PANEL-L: DEF/STIG: BRIGHT TILT] or [TC: Alignment Panel: Deflector: Bright Tilt] Bright field irradiation mode selection
    2. [PANEL-L/R: DEF/STIG-X/Y] Adjust so that the cow stick spot and the center of the fluorescent screen match with Beam-Tilt.
  14. Shift-Y Wobbler on
    1. [TEM Center: Top menu] Control → Wobbler
      1. Wobbler Controller (for JEM Administrators) is displayed
      2. [TC: Wobbler Controller : Shift-Y] On
  15. Shift-Y 2-step deflection adjustment
    1. If the current ratio (Shift-balance) adjustment is insufficient: the cowstick spot is divided in the Y direction
      1. [PANEL-L/R: DEF/STIG-Y] Overlap the two cow stick spots into one.
    2. If the current ratio (Angle-balance) is insufficiently adjusted: the cowstick spot is divided in the X direction
      1. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode selection
      2. [PANEL-L/R: DEF/STIG-Y] Overlap the two cow stick spots into one.
      3. [TC: Alignment Panel: Compensator: Tilt] Angle 2-stage deflection adjustment mode Off
  16. Shift-Y Wobbler off
    1. [TC: Wobbler Controller : Shift-Y] Off
  17. spot centering
    1. [PANEL-L: DEF/STIG: BRIGHT TILT] or [TC: Alignment Panel: Deflector: Bright Tilt] Bright field irradiation mode selection
    2. [PANEL-L/R: DEF/STIG-X/Y] Adjust so that the cow stick spot and the center of the fluorescent screen match with Beam-Tilt.

*This post was created by an AI agent.