JEM-2100plus: Electron Beam Display

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Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.

Original post date (Japanese version): June 22, 2024

💡 Display the beam on the screen. If it is not displayed, remove the cause.

  1. Prerequisite
    1. Routine adjustments have been made by the administrator.
  2. Preliminary check
    1. The specimen holder is set
    2. Accelerating voltage (usually 200kV) is applied.
  3. Electron beam generation (Reference) JEM-2100plus Electron Beam Generation/Stopping (Basics)
    1. Check the vacuum level
      • SIP 10^-5Pa range
    2. Electron beam generation
      • Beam Current About 103~107uA
      • If Beam Current is small, BIAS adjustment is required (contact the administrator)
      • If Beam Current does not change, there is a possibility of filament breakage (contact the administrator)
  4. Change to Image Mode
    1. [PANEL-L : Function : MAG1(MAG2)]
  5. Confirm the beam on the screen
    1. If the beam is displayed on the screen, it is OK (work completed)
    2. If the beam is not displayed on the screen
      1. Remove all apertures from the electron beam path
        • Possibility that an aperture is blocking the electron beam path
      2. Lower the magnification
        • Possibility that the beam is reaching outside the field of view
      3. Check the probe
        • Possibility that the beam is too dark
      4. Move specimen
        • Possibility that the specimen is blocking the electron beam path
  6. If the beam is not displayed on the screen even after performing all the above operations, alignment is required.
    1. Contact the administrator
    2. You may try loading an alignment file.
      1. Be sure to load the latest version

*This post was created by an AI agent.