JEM-2100plus: Illumination System Alignment

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Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.

Original post date (Japanese version): June 22, 2024

💡 This page is a quick manual for the JEM-2100plus. The contents are subject to change. Please receive training in advance before actually using the equipment.

💡 Basic axis alignments are assumed to have been completed by the administrator.

BRIGHTNESS Adjustment

  1. [PANEL-L : BRIGHTNESS] Brightness adjustment
    1. Turn it fully clockwise once (maximum excitation/alarm sounds), then return it counterclockwise (converge).
      1. Clockwise: CL3 excitation strengthens: Focal length shortens
        1. When turned fully, the beam diverges (becomes darker).
      2. Counterclockwise: CL3 excitation weakens: Focal length lengthens
        1. When turned fully, the beam diverges (becomes darker)
  2. Brightness: Coarse/Fine adjustment selection
    1. [PANEL-L : BRIGHTNESS: CRS] While selected, the backlight turns on and the changing speed becomes x16.
  3. Brightness confirmation
    1. Confirm visually on the screen
    2. [TC: TEM System Task Bar : SCREEN]

Beam Centering

  1. [PANEL-R : STD FOCUS] Recall objective lens reference current
    1. Just in case
  2. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
  3. [PANEL-L : DEF/STIG : BRIGHT TILT] Select bright field illumination mode
  4. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen with Beam Shift

Condenser Lens Astigmatism Correction

  1. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
  2. [PANEL-L : DEF/STIG : COND STIG] Select condenser lens astigmatism adjustment mode
  3. [PANEL-L/R: DEF/STIG-X/Y] (Cond STIG) Make the spot shape closer to a perfect circle.

SPOT SIZE / α Selection (TEM Mode)

  • SPOT SIZE: Size of the electron beam when most converged
    • Smaller is brighter
  • α: Convergence angle when the electron beam is focused on the specimen. (Size of the parallel illumination area)
  1. [PANEL-R : STD FOCUS] Recall objective lens reference current
    1. Just in case
  2. [PANEL-L : PROBE CONTROL : SPOT SIZE] SPOT SIZE setting (1 to 5: Normal: 2)
  3. [PANEL-L : PROBE CONTROL : αSELECTOR] Convergence angle (illumination area) setting (1 to 9: Normal: 2)
  4. Perform Beam centering and Condenser lens astigmatism correction (if necessary)

Gun Tilt Adjustment (Simple)

💡 Make the electron beam emitted from the GUN incident straight onto the specimen along the optical axis. Assuming other optical systems are well adjusted.

  1. [PANEL-R : Function : MAG1] To image observation mode
    1. [PANEL-L : APERTURE CONTROL : OL(OPEN)] Objective aperture: OPEN
    2. [HCA] High contrast objective aperture: OPEN
    3. [SA] Selected area aperture: OPEN
  2. [PANEL-R : MAG/CAM L] Magnification setting (Normal: around x5000)
  3. [PANEL-R : STD FOCUS] Recall objective lens reference current
    1. Just in case
  4. Beam centering
    1. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
    2. [PANEL-L : DEF/STIG : BRIGHT TILT] Select bright field illumination mode
    3. [PANEL-L/R: SHIFT-X/Y] Center with Beam Shift
  5. GUN TILT adjustment
    1. [TEM Center: Upper menu] Control → Alignment Panel (If not displayed)
      1. Alignment Panel (for JEM Administrators) will be displayed.
    2. [TC : Alignment Panel : Deflector : GUN Align] Select GUN alignment mode
    3. [PANEL-L/R: DEF/STIG-X/Y] Make the beam brightest with Beam Tilt.

Condenser Lens Alignment

💡 Reduce beam escape when changing SPOT SIZE.

  1. Adjust GUN Tilt in advance. (If necessary)
  2. [PANEL-R : Function : MAG1] To image observation mode
    1. [PANEL-L : APERTURE CONTROL : OL(OPEN)] Objective aperture: OPEN
    2. [HCA] High contrast objective aperture: OPEN
    3. [SA] Selected area aperture: OPEN
  3. [PANEL-R : MAG/CAM L] Magnification setting (Normal: around 50K)
  4. [PANEL-R : STD FOCUS] Recall objective lens reference current
    1. Just in case
  5. [PANEL-L : BRIGHTNESS] Converge the beam on the fluorescent screen.
  6. Adjust at SPOT SIZE 1
    1. [PANEL-L : PROBE CONTROL : SPOT SIZE] Select 1
    2. [TEM Center: Upper menu] Control → Alignment Panel (If not displayed)
      1. Alignment Panel (for JEM Administrators) will be displayed.
    3. [TC : Alignment Panel : Deflector : GUN Align] Select GUN alignment mode
    4. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen with Beam Shift
  7. Adjust at SPOT SIZE 5
    1. [PANEL-L : PROBE CONTROL : SPOT SIZE] Select 5
    2. [PANEL-L : DEF/STIG : BRIGHT TILT] or [TC : Alignment Panel : Deflector : Bright Tilt ] Select bright field illumination mode
    3. [PANEL-L/R: SHIFT-X/Y] Move the beam to the center of the fluorescent screen with Beam Shift
  8. Repeat [Adjust at SPOT SIZE 1] and [Adjust at SPOT SIZE 5]

Condenser Aperture Centering

(Reference) JEM-2100plus: Aperture Operation: Condenser Aperture

💡 If the beam does not change concentrically (swings) when BRIGHTNESS is changed, the condenser aperture is misaligned from the optical axis, so adjust referring to the above.

*This post was created by an AI agent.