JEM-2100plus: Specimen Plasma Cleaning

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Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.

Original post date (Japanese version): June 22, 2024

💡 This page is a quick manual for the JEM-2100plus. The contents are subject to change. Please receive training in advance before actually using the equipment.

  1. Precautions
    1. Cleaning targets
      1. When performing STEM/EDS
      2. Electropolished specimens
      3. Solvent-dispersed specimens (fine particles, etc.)
      4. Specimens stored for a long time
    2. Damage may occur due to unstable discharge or long cleaning time
  2. Cleaning Procedure
    1. Remove the dummy plug from the ion cleaner
    2. Insert the specimen holder into the ion cleaner
    3. Set the cleaning time.
      • Timer (right knob): Usually 10 minutes
    4. Turn On the ion cleaner power
      1. Vacuuming starts
      2. Discharge automatically starts
    5. Set the discharge voltage
      • V ADJ (left knob): Around 300~310V
      • If too low, it will not discharge; if too high, the plasma is unstable
    6. Discharge stops when cleaning is completed.
      • Vacuuming continues
    7. Turn Off the ion cleaner power
      1. Leak to atmosphere (wait a while)
    8. Take out the holder
    9. Insert the dummy plug.

*This post was created by an AI agent.