JEM-2100plus: Specimen Mounting (Double Tilt Holder)

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Note: This page was translated by AI from the Japanese original. In case of any discrepancy, the Japanese version shall prevail.

Original post date (Japanese version): June 22, 2024

💡 Specimens and specimen holders are fragile, so handle them with care.

Specimen Mounting

  1. Preparation
    1. Place the specimen holder stand under a digital microscope (or stereomicroscope).
    2. Gather tools in an easy-to-work position.
      1. Precision tweezers
      2. Vacuum tweezers
      3. Dedicated screwdriver
      4. Silicone mat (temporary specimen placement)
    3. Turn on the digital microscope and focus on the specimen exchange stand.
  2. Specimen Preparation
    1. Specimen condition
      1. Must be sufficiently dry. (To prevent vacuum degradation)
      2. Must be securely fixed. (To prevent damage in the column and drift during observation)
      3. Must have low magnetization (to avoid being affected by the objective lens magnetic field)
      4. The area around the observation target must be sufficiently thin (considered to be 100nm or less).
    2. Take out the specimen and temporarily place it on the silicone mat.
      1. Make it easy to handle when loading the holder.
        1. You may place it on powder paper, etc.
        2. You may take it out directly from the grid case. (When using precision tweezers)
  3. Holder Preparation
    1. Take out the holder to be used from the holder station. (Here, a double-tilt beryllium holder)
      1. Turn on the holder station power
      2. Open the valve
        1. Wait until it leaks to the atmosphere.
      3. Take out the holder.
        1. Confirm that the Y-axis tilt of the stage is 0. (Check by looking directly at the holder)

        💡 If the stage is tilted, do not place it on the holder stand. Risk of holder damage.

    2. Set the holder on the specimen holder stand. (Place the tip of the holder on the specimen exchange stand)
    3. Fix the holder with the holder support screw.
    4. Evacuate the holder station
      1. Insert a dummy plug/or holder
      2. Press the [EVAC] button
        1. Check TMP MONITOR
          1. ACC lights up
          2. Wait until RUNNING lights up.
      3. Close the valve
      4. Turn off the holder station power
  4. Specimen Loading
    1. Loosen the fixing screw with the dedicated screwdriver (3 turns).

      💡 If you turn it too much, the screw will come off. If not loosened enough, the plate holding spring will not move.

    2. Move the plate holding spring off the specimen fixing plate with precision tweezers.
    3. Remove the specimen fixing plate and spacer, and temporarily place them on the silicone mat.
      • (Use precision tweezers and vacuum tweezers)
    4. Use vacuum tweezers to place the specimen on the tip of the holder.
      • (Observation surface facing down)
    5. Place the spacer on top of the specimen.
      • (Not required if the specimen thickness is 100um or more.)
    6. Place the specimen fixing plate on top of the spacer.
    7. Move the plate holding spring onto the specimen fixing plate. (2 locations)
    8. Tighten the fixing screw with the dedicated screwdriver. (2 locations)

      💡 Do not tighten too strongly. (Just the right strength) Make sure it is not loose

Specimen Removal

💡 Reverse procedure of specimen mounting

  1. Pull out the specimen holder from the column
  2. Set the holder on the specimen holder stand. (Place the tip of the holder on the specimen exchange stand)
  3. Fix the holder with the holder support screw.
  4. Specimen Removal
    1. Loosen the fixing screw with the dedicated screwdriver (3 turns).
    2. Move the plate holding spring off the specimen fixing plate with precision tweezers.
    3. Remove the specimen fixing plate and spacer, and temporarily place them on the silicone mat.
    4. Remove the specimen from the tip of the holder and place it on the silicone mat.
      1. You may return it directly to the grid case.
    5. Place the spacer on the tip of the holder.
    6. Place the specimen fixing plate on top of the spacer.
    7. Move the plate holding spring onto the specimen fixing plate. (2 locations)
    8. Tighten the fixing screw with the dedicated screwdriver. (2 locations)
  5. Return the holder to the holder station.
    1. Turn on the holder station power
    2. Open the valve
      1. Wait until it leaks to the atmosphere.
    3. Remove the dummy plug.
    4. Insert the holder
    5. Evacuate the holder station
      1. Insert a dummy plug/or holder
      2. Press the [EVAC] button
        1. Check TMP MONITOR
          1. ACC lights up
          2. Wait until RUNNING lights up.
      3. Close the valve
      4. Turn off the holder station power

*This post was created by an AI agent.